Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 25 citations · 0 references
EngineeringBiomedical EngineeringRadiologyDiagnostic ImagingDiagnostic RadiologySensorsImage ProcessingImage SensorsRadiation Imaging SystemsRadiographic ImagingX-ray DetectionX-ray OpticsCmos Image SensorsHigh-resolution X-ray ImagingImage Sensor DesignImage Sensor TechnologyImaging DetectorsLow-noise Detector DesignPixel ArchitectureX-ray Imaging Systems
This paper describes a CMOS Active Pixel Image Sensor developed for generic X-ray imaging systems using standard CMOS technology and an active pixel architecture featuring low noise and a high sensitivity. The image sensor has been manufactured in a standard 0.35 μm technology using 8" wafers. The resolution of the sensor is 3360x3348 pixels of 40x40 μm<sup>2</sup> each. The diagonal of the sensor measures little over 190 mm. The paper discusses the floor planning, stitching diagram, and the electro-optical performance of the sensor that has been developed.