Publication | Closed Access
Growth kinetics of three Mo-silicide layers formed by chemical vapor deposition of Si on Mo substrate
54
Citations
21
References
2002
Year
Materials EngineeringEpitaxial GrowthEngineeringMo SubstrateSurface ScienceApplied PhysicsSiliceneChemistryChemical DepositionSilicon On InsulatorGrowth KineticsChemical Vapor Deposition
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