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Optimization of ZnSe–SiO2 nanostructures deposited by radio-frequency magnetron sputtering: Correlations between plasma species and thin film composition, structural and microstructural properties

Materials SciencePlasma SpeciesEngineeringNanomaterialsNanotechnologyApplied PhysicsZnse–sio2 NanostructuresThin Film Process TechnologyRadio-frequency Magnetron SputteringThin FilmsChemical Vapor DepositionThin Film ProcessingSemiconductor Nanostructures