Publication | Closed Access
High rate deposition of amorphous hydrogenated carbon films by hollow cathode arc PECVD
12
Citations
18
References
2012
Year
Materials ScienceMaterials EngineeringChemical EngineeringHigh Rate DepositionCarbon FilmsEngineeringApplied PhysicsThin FilmsPulsed Laser DepositionChemical DepositionChemical Vapor DepositionThin Film Processing
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