Synthesis of ordered large-scale ZnO nanopore arrays

Abstract

An effective approach is demonstrated for growing ordered large-scale ZnO nanopore arrays through radio-frequency magnetron sputtering deposition on porous alumina membranes (PAMs). The realization of highly ordered hexagonal ZnO nanopore arrays benefits from the unique properties of ZnO (hexagonal structure, polar surfaces, and preferable growth directions) and PAMs (controllable hexagonal nanopores and localized negative charges). Further evidence has been shown through the effects of nanorod size and thermal treatment of PAMs on the yielded morphology of ZnO nanopore arrays. This approach opens the possibility of creating regular semiconducting nanopore arrays for the application of filters, sensors, and templates.