Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 10 citations · 0 references
Natural SciencesMaterials EngineeringMaterials ScienceOptical MaterialsSurface ScienceThin FilmsCoating ProcessesCoatingsSurface PhysicsThin Film Optical PropertiesThin-film DepositionThin-film MaterialsAbsorption LossCrystallinityCrystallinity EffectsMultilayer StacksOptical CoatingsProcess ParametersProcess Parameters OptimizationThin Oxide Layers
We present a complete systematic study on the effect of assist beam energy on SiO<sub>2</sub>/HfO<sub>2</sub> quarter wave stacks deposited by dual ion beam sputter (DIBS) deposition. Increasing assist beam energy results in lower surface roughness and reduced micro-crystallinity. The coatings also show reduced mechanical stress. The improvements in the structural properties are accompanied by a reduction in the absorption loss and an increase in the laser resistance to damage at 1 μm.