Publication | Closed Access

Use of silane for the deposition of hard and oxidation resistant Ti–Si–N coatings by a hybrid cathodic arc and chemical vapour process

Materials EngineeringMaterials ScienceChemical EngineeringChemical Vapour ProcessEngineeringCorrosionSurface ScienceSurface EngineeringHybrid Cathodic ArcThin FilmsSurface ProcessingChemical Vapor DepositionProtective Coating