Concepedia

Publication | Closed Access

Characterization of silicon carbide thin films prepared by VHF-PECVD technology

DOI

21

Citations

7

References

2004

Year

S. Zhang, Leandro Raniero, Elvira Fortunato, L. Pereira, N. Martins, P. Canhola, I. Ferreira, N. Nedev, Hugo Águas, Rodrigo Martins
Journal of Non-Crystalline Solids

References

YearCitations

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