Structural determination of pyrolyzed PI‐2525 polyimide thin films

Abstract

Abstract Polyimide was pyrolyzed in an argon atmosphere at various temperatures, and thermally converted to amorphous carbon films. The irreversible change of polyimide under progressive heat treatment is characterized by three successive structural changes: pyrolysis, carbonization, and graphitization. X‐ray photoelectron spectroscopy (XPS) studies show that the polyimide starts to dissociate at pyrolysis temperatures above 500°C. At temperatures higher than 650°C most functional groups of polyimide decompose to evolve gases from the sample. The polyimide then gradually becomes more carbon rich. It is believed that at pyrolysis temperature higher than 650°C the polyimide starts to form heterocyclic structures with residual oxygen and nitrogen incorporated into the heterocyclic carbon rings. X‐ray analyses indicate that the polyimide at pyrolysis temperatures less than 1000°C is amorphous carbon and no long‐term periodic structure can be detected. At pyrolysis temperatures higher than 2000°C, the polyimide is converted to microcrystalline graphite.