Publication | Closed Access
Chemical vapour deposition of MoS2 coatings using the precursors MoCl5 and H2S
42
Citations
14
References
1999
Year
Materials ScienceMaterials EngineeringChemical EngineeringIi-vi SemiconductorEngineeringThermal Spray CoatingLayered MaterialCorrosionSurface SciencePrecursors Mocl5Mos2 CoatingsChemistryChemical VapourChemical DepositionChemical Vapor Deposition
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