Publication | Closed Access
Growth of well-oriented AlxIn1−xN films by sputtering at low temperature
41
Citations
29
References
2009
Year
Materials EngineeringMaterials ScienceAluminium NitrideEngineeringWell-oriented Alxin1−xn FilmsSurface ScienceApplied PhysicsThin Film Process TechnologyThin FilmsChemical DepositionChemical Vapor DepositionThin Film Processing
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