A Grazing Incidence Monochromator With A Varied-Space Plane Grating For Synchrotron Radiation

Abstract

A grazing incidence monochromator to scan the 5 - 100 Å wavelength range of synchrotron radiation is designed by taking advantage of the focusing property of a varied-space plane grating ruled with a numerically controlled ruling engine. The plane grating monochromator uses only two plane surfaces for reflection optics so that high throughput in the soft x-ray region is expected.