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Properties of vanadium oxide thin films for ethanol sensor
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1997
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Materials ScienceRf Reactive SputteringEngineeringOxide ElectronicsGas SensorSurface ScienceVanadium OxidesEthanol SensorChemistryThin FilmsChemical SensorElectrochemical Gas SensorElectrochemistryThin Film Processing
Thin films of vanadium oxides for ethanol sensor applications were been prepared by means of rf reactive sputtering from a vanadium pentoxide target in an Ar–O2 atmosphere. Films with the best sensitivity and selectivity were obtained with 15% oxygen at a working temperature between 280 and 300 °C. These films show a very low sensitivity to CO, CO2, and CH4 and total insensivity to NH3.