Concepedia

Vacuum pressure thermal thin-film sensor

T.M. Berlicki, S.J. Osadnik, Eugeniusz Prociów

Vacuum · 1999 · 12 citations · 0 references

Concepts

EngineeringMaterials SciencePhysicsHeat TransferSensorsThin FilmsPressure MeasurementPressure SensorsTemperature MeasurementTemperature SensorsThermal SensorsThin Film Thermal PropertiesThin-film SensorsThin-film Thermal SensorsVacuum Pressure Measurement