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Wear life evaluation of diamond-like carbon films deposited by microwave plasma-enhanced CVD and RF plasma-enhanced CVD method

Materials ScienceMicrowave Plasma-enhanced CvdElectrical EngineeringDiamond-like CarbonEngineeringWear TestingWear PreventionWear Life EvaluationCarbon MaterialsWear-resistant MaterialDiamond-like Carbon FilmsPlasma Processing