XPS characterization of TiO₂layers deposited on quartz plates

Abstract

TiO2 layers for gas sensing applications were obtained by Liquid Phase Deposition (LPD). The layers were deposited on gold-coated piezoelectric quartz crystals. The surface structure, morphology and chemical properties were analysed by X-ray diffraction (XRD), Scanning Electron Microscopy (SEM) and X-ray Photoelectron Spectroscopy (XPS). SEM showed that the layers were porous and composed of uniform crystalline grains. XPS indicated them to be non-stoichiometric.