Publication | Open Access
Enhanced negative ion yields on diamond surfaces at elevated temperatures
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Citations
30
References
2011
Year
EngineeringVacuum DeviceChemistryPlasma ProcessingHopg SurfaceIon ImplantationCarbon-based MaterialIon BeamIon EmissionDiamond SurfacesPyrolytic CarbonMaterials ScienceBoron-doped Polycrystalline DiamondHydrogenDiamond-like CarbonBdd SurfaceSurface ScienceApplied PhysicsGraphene
Boron-doped polycrystalline diamond (BDD) and highly oriented pyrolytic graphite (HOPG) surfaces were exposed to low pressure hydrogen plasma. The relative yields of surface-produced H − ions were measured by an energy analyser quadrupole mass spectrometer. The highest H − yield was obtained at 400 °C for a BDD surface and at room temperature for an HOPG surface. At low ion bombardment energy, the maximum yield on a BDD surface is about 5 times higher than that on an HOPG surface, which has been the best carbon material so far for surface production of H − ions in caesium-free plasma. Raman measurements revealed surface modifications after plasma exposure.
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