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Modeling of non-stoichiometric silicon oxides obtained by plasma enhanced chemical vapour deposition process

Materials ScienceMaterials EngineeringChemical EngineeringNon-stoichiometric Silicon OxidesEngineeringOxide ElectronicsSurface ScienceApplied PhysicsSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsPlasma ProcessingChemical Vapor Deposition