Thin Solid Films · 1997 · 80 citations · 15 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials CharacterizationMechanical Behavior Of MaterialsStructural MaterialsSilicon MaterialsThin Film Mechanical PropertiesThin Film StrainThin-film MaterialsSiliconSilicon Mechanical PropertiesSilicon Thin FilmsSilicon-containing Alloys
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