Concepedia

Relation between mechanical and structural properties of silicon-incorporated hard a-C:H films

A.L. Baia Neto, Raphael Santos, F.L. Freire, S.S. Camargo, R. Carius, F. Finger, W. Beyer

Thin Solid Films · 1997 · 80 citations · 15 references

DOI

Concepts

References

15

Hard amorphous (diamond-like) carbons

John Robertson · Progress in Solid State Chemistry · 1991 · 786 citations

, , +9

Infrared absorption strength and hydrogen content of hydrogenated amorphous silicon

A. A. Langford, M. L. Fleet, B. P. Nelson et al. · Physical review. B, Condensed matter · 1992 · 625 citations

, , +17

rf-plasma deposited amorphous hydrogenated hard carbon thin films: Preparation, properties, and applications

A. Bubenzer, B. Dischler, G. B. Brandt et al. · Journal of Applied Physics · 1983 · 500 citations

, , +17

The deposition mechanism of diamond-like a-C and a-C: H

John Robertson · Diamond and Related Materials · 1994 · 407 citations

, , +6

Internal stress reduction by nitrogen incorporation in hard amorphous carbon thin films

D. F. Franceschini, Carlos A. Achete, F.L. Freire · Applied Physics Letters · 1992 · 223 citations

, , +17