Publication | Closed Access
Measurement of residual stress in DLC films prepared by plasma-based ion implantation and deposition
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Citations
11
References
2004
Year
Materials ScienceIon ImplantationEngineeringApplied PhysicsResidual StressDlc FilmsElectronic PackagingPlasma ProcessingChemical Vapor DepositionThin Film ProcessingPlasma-based Ion Implantation
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