Measurement of residual stress in DLC films prepared by plasma-based ion implantation and deposition

Compressive-stress-induced formation of thin-film tetrahedral amorphous carbon

David R. McKenzie, David A. Muller, Bernard Pailthorpe · Physical Review Letters · 1991 · 955 citations

Natural Sciences, Materials Engineering, Materials Science +13

Properties of filtered-ion-beam-deposited diamondlike carbon as a function of ion energy

P. Fallon, V.S. Veerasamy, C. A. Davis et al. · Physical review. B, Condensed matter · 1993 · 886 citations

Natural Sciences, Materials Engineering, Materials Science +9

A simple model for the formation of compressive stress in thin films by ion bombardment

C. A. Davis · Thin Solid Films · 1993 · 808 citations

Natural Sciences, Materials Science, Physics +15

Properties of diamond-like carbon

John Robertson · Surface and Coatings Technology · 1992 · 778 citations

Natural Sciences, Materials Engineering, Materials Science +11

Internal stress reduction by nitrogen incorporation in hard amorphous carbon thin films

D. F. Franceschini, Carlos A. Achete, F.L. Freire · Applied Physics Letters · 1992 · 223 citations

Natural Sciences, Materials Engineering, Materials Science +17