Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1994 · 85 citations · 22 references
EngineeringElectrical EngineeringPhysicsMicroelectronicsRadiation DetectionSemiconductor DevicesDetector TechnologyEnergy ResolutionParticle DetectorsPhotodetectorsRadiation DetectorsSemiconductor DetectorsDetector Energy ResolutionIntrinsic Energy ResolutionRadiation Energy ResolutionSemiconductor Detector ResolutionSilicon DetectorsSilicon Semiconductor DetectorsSystem Energy Resolution
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Sputtering studies with the Monte Carlo Program TRIM.SP
J.P. Biersack, W. Eckstein · Applied Physics A · 1984 · 916 citations