Concepedia

Aluminium implantation of p-SiC for ohmic contacts

L. Spieβ, O. Nennewitz, H. Weishart, J. Lindner, W. Skorupa, H. Romanus, F. Erler, J. Pezoldt

Diamond and Related Materials · 1997 · 10 citations · 0 references

Concepts

EngineeringMaterials EngineeringMaterials ScienceCeramic MaterialsCeramicsElectronic MaterialsIon ImplantationMetal-semiconductor ContactsSemiconductor Device MaterialsAluminium AlloysOhmic ConductionOhmic ContactsOhmic MaterialsSilicon Carbide (Sic) Materials