Concepedia

Study of the oxidation of aluminium nitride coatings at high temperature

Florence Ansart, H. Ganda, Robert Saporte, J.P. Traverse

Thin Solid Films · 1995 · 36 citations · 5 references

DOI

Concepts

References

5

Kinetics and initial stages of oxidation of aluminum nitride: Thermogravimetric analysis and x-ray photoelectron spectroscopy study

A. D. Katnani, K. I. Papathomas · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1987 · 122 citations

, , +17

Oxidation stages of aluminium nitride thin films obtained by plasma-enhanced chemical vapour deposition (PECVD)

Nathalie Azéma, J. Durand, R. Berjoan et al. · Journal of the European Ceramic Society · 1991 · 35 citations · Full text

, , +16

Some properties of chemically vapor deposited films of AlxOyNz on silicon

E. A. Irene, V. J. Silvestri, G. R. Woolhouse · Journal of Electronic Materials · 1975 · 28 citations

, , +10

An EELS investigation of oxygen localization in the AlN structure

S. E. H. Abaidia, V. Serin, G. Zanchi et al. · Philosophical magazine. A/Philosophical magazine. A. Physics of condensed matter. Structure, defects and mechanical properties · 1995 · 11 citations

, , +15

Infrared Optical Properties of Aluminium Oxynitride Films. Theoretical Interpretation by the Al-Centered Tetrahedral Model

Florence Ansart, J. Bernard · physica status solidi (a) · 1992 · 11 citations

, , +17