Uncertainty evaluation for measurements of peak-to-valley surface form errors

Guidelines for expressing the uncertainty of measurement results containing uncorrected bias

Steven Phillips, Keith R. Eberhardt, Blair A. Parry · Journal of Research of the National Institute of Standards and Technology · 1997 · 83 citations · Full text

Engineering, Quality Management, Metrology +10

Contribution of CIRP to the Development of Metrology and Surface Quality Evaluation during the last fifty years

J. Peters, Jenny Bryan, William T. Estler et al. · CIRP Annals · 2001 · 54 citations

Engineering, Materials Engineering, Metrology +13

Noise bias removal in profile measurements

Han Haitjema, M. Morel · Measurement · 2005 · 47 citations

Engineering, Computational Engineering, Metrology +12

Silicon wafer thickness variation measurements using the National Institute of Standards and Technology infrared interferometer

Tony L. Schmitz, Angela Davies, C. J. Evans et al. · Optical Engineering · 2003 · 38 citations

Engineering, Electrical Engineering, Instrumentation +16

Uncertainty propagation in Surface Plate measurements

Han Haitjema · TU/e Research Portal · 1992 · 23 citations

Engineering, Geophysics, Metrology +15