Japanese Journal of Applied Physics · 1995 · 47 citations · 6 references
EngineeringMechanical EngineeringRing MethodSilicon On InsulatorThermodynamicsSolidificationSic CrucibleMaterials ScienceSurface TensionSolid MechanicsSemiconductor Device FabricationMolten Silicon MeasuredMicrostructureSilicon DebuggingHigh Temperature MaterialsMicrofabricationSurface ScienceApplied PhysicsSurface Tension DataAmorphous SolidSurface Tension Variation
The detailed temperature dependence of the surface tension of molten silicon was measured using an accurate ring method. The surface tension data obtained using a SiC-coated graphite crucible showed an approximately linear temperature dependence from 1,430° C to 1,650° C. Although the temperature dependence of the surface tension of molten silicon in a quartz glass crucible was similar to the above, the maximum value of the surface tension was about 20 dyn/cm smaller than that in the case of the SiC crucible. The temperature coefficient of the surface tension became positive at about 1,425° C and returned to a negative value just above the melring point. These results indicate that surface melt flow near the meniscus of a growing crystal tends to be opposite to the crystal.
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The surface tension of liquid silicon
S.C. Hardy · Journal of Crystal Growth · 1984 · 111 citations
Oxygen Solubilities in Si Melt:Influence of Sb Addition
Xinming Huang, Kazutaka Terashima, Hiroshi Sasaki et al. · Japanese Journal of Applied Physics · 1993 · 49 citations