Properties of ITO thin films deposited by RF magnetron sputtering at elevated substrate temperature

Electrical properties and defect model of tin-doped indium oxide layers

Gerhard Frank, Heiner K�stlin · Applied Physics A · 1982 · 618 citations

Natural Sciences, Materials Engineering, Materials Science +16

Electrical and structural properties of low resistivity tin-doped indium oxide films

Yuzo Shigesato, Satoru Takaki, T. Haranoh · Journal of Applied Physics · 1992 · 362 citations

Natural Sciences, Materials Engineering, Materials Science +17

Effect of target-substrate distance on the growth and properties of rf-sputtered indium tin oxide films

Chandra Kumar, Abhai Mansingh · Journal of Applied Physics · 1989 · 151 citations

Natural Sciences, Materials Engineering, Materials Science +17

Studies on the preferred orientation changes and its influenced properties on ITO thin films

P. Thilakan, J. Kumar · Vacuum · 1997 · 90 citations

Natural Sciences, Materials Engineering, Materials Science +13

Ionized impurity scattering in degenerate In2O3

Robert Clanget · Applied Physics A · 1973 · 81 citations

Natural Sciences, Materials Science, Physics +10