IR laser photosensitized decomposition of trimethyl(2-propynyloxy)silane for chemical vapour deposition of polydimethylsiloxane phases

Markéta Urbanová, Hiroshi Morita, Vladislav Dřı́nek, Zdenĕk Bastl, Ján Šubrt, Josef Pola

Journal of Analytical and Applied Pyrolysis · 1998 · 12 citations · 22 references

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