One-Dimensional Fluid Model and Characteristics of the Dielectric Barrier Discharge in $0.99\hbox{Xe}\hbox{-}0.01\hbox{Cl}_{2}$ Mixture

Abstract

The 1-D fluid model of the two-barrier Xe-Cl <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> excilamp radiating at wavelength of 308 nm is developed. The radiation is excited in a 4-mm gas gap between dielectric-layers-covered metallic electrodes using the dielectric barrier discharge (DBD). The spatio-temporal characteristics of the DBD for 0.99Xe-0.01Cl <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> mixture at pressure 250 torr are simulated at applying to the electrodes sinusoidal voltage with a frequency of 100 kHz and an amplitude of 4.25 kV. The average power density inputted in the discharge is 2.8 W/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sup> per cycle and outputted in the form of the ultraviolet emission is 0.78 W/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sup> per cycle. It is shown that additive of 1% molecular chlorine to xenon allows getting ~90% radiation on XeCl* molecule band (308 nm) at the discharge radiative efficiency ~26%. For most parts of the voltage cycle, the Xe-Cl <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> plasma is electronegative, and the most abundant ions are Xe <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">+</sup> and Cl <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-</sup> . However, at propagation of a current pulse over discharge gap, the plasma becomes electropositive near dielectric surface, where the most abundant charged particles become electrons and Xe <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">+</sup> ions.