Characterization of interface of c-BN film deposited on silicon(100) substrate - Concepedia

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Characterization of interface of c-BN film deposited on silicon(100) substrate

12

Citations

8

References

1999

Year

Jingze Tian, Lifang Xia, Xinxin Ma, Yue Sun, Eungsun Byon, Sunghun Lee, Sang-ro Lee

Thin Solid Films

Materials ScienceEngineeringC-bn FilmNanoelectronicsSurface ScienceApplied PhysicsSemiconductor Device FabricationSilicon On InsulatorChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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