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Monte Carlo calculations of the spatial resolution in a scanning auger electron microscope

EngineeringElectron MicroscopyPhysicsMonte-carlo ModellingMicroscopyMicroscopy MethodScanning Probe MicroscopyApplied PhysicsAtomic PhysicsElectron MicroscopeComputational ImagingMonte Carlo CalculationsInstrumentationSpatial ResolutionElectron OpticScanning Auger