Determination of the vibrational, rotational and electron temperatures in N<sub>2</sub>and Ar–N<sub>2</sub>rf discharge

Nikolay Britun, Mireille Gaillard, A. Ricard, Y M Kim, Kun‐Soo Kim, J.G. Han

Journal of Physics D Applied Physics · 2007 · 180 citations · 35 references

Abstract

International audience

References

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