A microstructural study of indium-indium oxide composite films

Abstract

We have investigated the microstructure of indium-indium oxide composite films prepared by thermal vapor deposition in the oxygen atmosphere. The films show granular-amorphous structural phase transformation near the oxygen concentration of 2 × 10−4 Torr. Although the thermal evaporation generates films with indium grains much larger in size than the reactive sputter deposition, the film resistivity shows the characteristics of the homogeneous films as long as the thickness is larger than the grain size.