Concepedia

Angular distributions of sputtered atoms for low-energy heavy ions, medium ions and light ions

Yasunori Yamamura, Y. Mizuno, Hidetoshi Kimura

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1986 · 23 citations · 5 references

DOI

Concepts

References

5

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Peter Sigmund · Physical Review · 1969 · 3.5K citations

, , +13

Computer simulation of atomic-displacement cascades in solids in the binary-collision approximation

Mark T. Robinson, Ian M. Torrens · Physical review. B, Solid state · 1974 · 1.6K citations

, , +17

Sputtering studies with the Monte Carlo Program TRIM.SP

J.P. Biersack, W. Eckstein · Applied Physics A · 1984 · 916 citations

, , +8

Computer simulation of sputtering II

D. E. Harrison, Wally Moore, Horace Truman Holcombe · Radiation Effects · 1973 · 76 citations

, , +16

Computer studies of the energy spectra and reflection coefficients of light ions

Wataru Takeuchi, Y. Yamamura · Radiation Effects · 1983 · 65 citations

, , +14