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A study of electron beam evaporated SiO2, TiO2, and Al2O2 films using RBS, HFS, and SIMS

DOI

22

Citations

0

References

1990

Year

S. Baumann, C. C. Martner, David W. Martin, R. J. Blattner, A.J. Braundmeier
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

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