Concepedia

A study of electron beam evaporated SiO2, TiO2, and Al2O2 films using RBS, HFS, and SIMS

S. Baumann, C. C. Martner, David W. Martin, R. J. Blattner, A.J. Braundmeier

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1990 · 22 citations · 0 references

DOI

Concepts