Russian Physics Journal · 2014 · 18 citations · 11 references
Natural SciencesMaterials EngineeringMaterials ScienceSurface EngineeringSurface ScienceThin FilmsCoating ProcessesCoating TechnologyCoatingsSurface CoatingsThin-film DepositionThin-film MaterialsThin-film CoatingsTitanium Nitride CoatingsTitanium Oxides
11
D. E. Kelleher, William C. Martin, W. L. Wiese et al. · APS Division of Atomic, Molecular and Optical Physics Meeting Abstracts · 1998 · 683 citations
B. Subramanian, C. V. Muraleedharan, M. Jayachandran · Surface and Coatings Technology · 2011 · 287 citations
Natural Sciences, Materials Engineering, Materials Science +16
Sputtering yields of compounds using argon ions
M. P. Seah, Tim Nunney · Journal of Physics D Applied Physics · 2010 · 153 citations · Full text