Sensors and Actuators A Physical · 1992 · 108 citations · 0 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSensorsThin FilmsFerroelectric MaterialsForce SensingMechanical SensorsPiezoelectric MaterialsPressure MeasurementPressure SensorsFerroelectric Thin FilmsPiezoelectric Pressure SensorsPiezoelectric PropertiesPiezoelectric Thin FilmsResonant Pressure SensingResonant Pressure SensorsThin-film Piezoelectrics