Publication | Closed Access
Fluorinated polymer films from r.f. plasmas containing benzene and sulfur hexafluorine
34
Citations
22
References
1992
Year
Materials ScienceSulfur HexafluorineEngineeringPolymer TechnologyPolymer ScienceChemistryNonthermal PlasmaFunctional PolymerPlasma ProcessingPolymer ChemistryPolymer Films
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