Concepedia

Reactive ion plating (RIP) with auxiliary discharge and the influence of the deposition conditions on the formation and properties of TiN films

Werner Fleischer, Dietmar Schulze, R. Wilberg, A. Lunk, F. Schrade

Thin Solid Films · 1979 · 31 citations · 4 references

DOI

Concepts

References

4

Interaction of oxygen and nitrogen with clean transition metal surfaces

E. Fromm, Otto Mayer · Surface Science · 1978 · 102 citations

, , +12

Applications of wear-resistant thick films formed by physical vapor deposition processes

Kazuo Nakamura, Konosuke INAGAWA, Kazuyuki Tsuruoka et al. · Thin Solid Films · 1977 · 96 citations

, , +14

The Particle Kinetics of Plasmas

L. Solymár · Electronics and Power · 1967 · 42 citations

, , +10

Adhesion of Ion Plated Films and Energies of Deposition

D.G. Teer · The Journal of Adhesion · 1977 · 36 citations

, , +16