Japanese Journal of Applied Physics · 2002 · 49 citations · 3 references
Materials ScienceMaterials EngineeringMultiferroicsSol-gel Spin-coating MethodEngineeringFerroelasticsFerroelectric ApplicationApplied PhysicsFerroelectric CapacitorsFerroelectric MaterialsConventional Ferroelectric MaterialsThin FilmsFunctional MaterialsMagnetoelectric Materials
Solid solutions between Bi2SiO5 and conventional ferroelectric materials such as Bi4Ti3O12, SrBi2Ta2O9 and Pb(Zr,Ti)O3 were formed using a sol-gel spin-coating method. It was found that the crystallization temperatures of the films were lower by 150 to 200°C than those of the original ferroelectric films and that the surface of the films became very flat and smooth. Because of these excellent properties, ultrathin (13- to 25-nm-thick) ferroelectric capacitors were successfully fabricated, in which the polarization was well saturated at an applied voltage of 0.5 V. Discussion on the formation mechanism of the films is also presented.
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