Reflection properties of nanostructure-arrayed silicon surfaces

Abstract

The reflection properties of 300 nm periodically structured silicon surfaces with depth varying between 35 and 190 nm, prepared by interference lithography, were examined in the range 200 nm<λ<3000 nm. A decrease in the reflectivity that becomes stronger with increasing structure depth is observed below 1000 nm. This broad-band reduction is caused by diffraction effects at short wavelengths and by the `moth-eye effect' at long wavelengths. The results show a universal behaviour in the optical-path to wavelength ratio dependence of the reflectivity and are in good agreement with the results obtained for the `moth-eye effect' from the effective medium theory.