Development of a Novel Low Temperature Co-Fired Ceramics System Composed of Two Different Co-Firable Low Temperature Co-Fired Ceramics Materials

Abstract

Two co-firable low temperature co-fired ceramics (LTCC) materials with different permittivities were investigated. The first material has low-K and high stiffness, and the second material has high-K, high-Q, and near zero temperature coefficient of capacitance (TCC). A resistor material, which is mainly composed of RuO2 and glass, is able to be buried into the LTCC substrate. To adjust the properties to the electric circuits, laser trimming of the embedded capacitors and resistors was performed. The constrained sintering method was applied to the substrate, and the dimension accuracy of the substrate is excellent.