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Effect of radio frequency and direct current modes of deposition on protective metallurgical hard silicon carbon nitride coatings by magnetron sputtering

Materials ScienceMaterials EngineeringEngineeringRadio FrequencyHard CoatingDirect Current ModesApplied PhysicsMagnetron SputteringMicroelectronicsSurface ProcessingChemical Vapor DepositionThin Film ProcessingProtective Coating