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In situ study of thin film growth by internal stress measurement under ultrahigh vacuum conditions: Silver and copper under the influence of oxygen

Materials ScienceEngineeringSitu StudySurface ScienceApplied PhysicsUltrahigh Vacuum ConditionsInternal Stress MeasurementVacuum DeviceThin FilmsChemical DepositionChemical Vapor DepositionThin Film ProcessingMicrostructure