Helical Nanoholes Bored in Silicon by Wet Chemical Etching Using Platinum Nanoparticles as Catalyst

Metal-assisted chemical etching in HF/H2O2 produces porous silicon

X. Li, Paul W. Bohn · Applied Physics Letters · 2000 · 1K citations

Engineering, Materials Engineering, Materials Science +17

A Formation Mechanism for Catalytically Grown Helix-Shaped Graphite Nanotubes

S. Amelinckx, X. B. Zhang, D. Bernaerts et al. · Science · 1994 · 1K citations

Natural Sciences, Materials Engineering, Materials Science +17

Microelectromechanical systems (MEMS): fabrication, design and applications

Jack W. Judy · Smart Materials and Structures · 2001 · 817 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +16

The Physics of Macropore Formation in Low Doped n‐Type Silicon

V. Lehmann · Journal of The Electrochemical Society · 1993 · 692 citations

Engineering, Materials Engineering, Materials Science +17

Electrochemical Micromachining

Rolf Schuster, Viola Kirchner, P. Allongue et al. · Science · 2000 · 582 citations

Engineering, Manufacturing Engineering, Materials Engineering +17