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Intelligent Window Coatings: Atmospheric Pressure Chemical Vapor Deposition of Tungsten-Doped Vanadium Dioxide
392
Citations
13
References
2004
Year
Thin Film PhysicsEngineeringThin Film Process TechnologyChemistryChemical DepositionVacuum DeviceChemical EngineeringTungsten-doped VanadiumThin Film ProcessingMaterials EngineeringMaterials ScienceOxide ElectronicsTungsten-doped Vanadium DioxideIntelligent Window CoatingLayered MaterialNatural SciencesSurface ScienceMaterials CharacterizationIntelligent Window CoatingsThin FilmsChemical Vapor Deposition
Thin films of tungsten-doped vanadium(IV) oxide were prepared on glass substrates from the atmospheric pressure chemical vapor deposition of vanadium(IV) chloride, tungsten(VI) ethoxide, and water at 500−600 °C. The films were characterized by Raman microscopy, glancing angle X-ray diffraction (GAXRD), X-ray photoelectron spectroscopy (XPS), Rutherford backscattering (RBS), scanning electron microscopy (SEM), and vis/IR reflectance−transmittance. The films showed a reduction in thermochromic transition temperatures from 68 °C in VO2 to 42 °C in V0.99W0.01O2approaching that required for commercial use as an intelligent window coating.
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