Spectroscopic Study of a Radio-Frequency Atmospheric Pressure Dielectric Barrier Discharge with Anodic Alumina as the Dielectric

Abstract

This paper presents the fabrication and a spectroscopic study of a stable radio-frequency dielectric barrier discharge (RF DBD) in Ar with a novel dielectric, anodic alumina, at atmospheric pressure. Dielectric electrodes are fabricated from commercially available low cost impure aluminum strips by a two-step anodization process in 0.3 M solution of oxalic acid. The discharge is found to be stable with excellent spatial uniformity for the RF input power range of 30∼80 W. Excitation and rotational temperatures measured in the experiment range of 1472∼3255 K and 434∼484 K, respectively, as the input power changes from 30 W to 80 W. These temperature ranges are suitable for surface modification applications.