Ultralow-Loss Planar $\hbox{Si}_{3}\hbox{N}_{4}$ Waveguide Polarizers

Abstract

We demonstrate broadband (1500-1620 nm) and low-loss planar waveguide polarizers with measurement-limited on-chip extinction as high as 75 dB. Polarizers can be fabricated in higher confinement 100-nm-thick as well as lower confinement 40-nm-thick Si <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> N <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">4</sub> cores to suit a variety of photonic systems.