Materials Science and Engineering B · 2006 · 16 citations · 13 references
Natural SciencesMaterials EngineeringMaterials ScienceNanomaterialsNanotechnologyThin FilmsMicrofabrication MaterialsSemiconductor Thin FilmsSilicon MaterialsThin-film DepositionThin-film MaterialsThin-film PatterningDeposition On Nanostructured SubstratesFilm DepositionNanoparticlesSiliconSilicon Thin FilmsThin Film Deposition MaterialsThin Film Nanostructuring
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