Publication | Closed Access
Synthesis and characterization of multi-element oxynitride semiconductor film prepared by reactive sputtering deposition
16
Citations
23
References
2012
Year
Materials EngineeringMaterials ScienceEngineeringNanoelectronicsOxide ElectronicsApplied PhysicsChemical DepositionChemical Vapor DepositionThin Film ProcessingReactive Sputtering Deposition
| Year | Citations | |
|---|---|---|
Page 1
Page 1