Applied Physics Letters · 1988 · 22 citations · 8 references
Natural SciencesMaterials SciencePhysicsCondensed Matter PhysicsSolid State PhysicsThin FilmsSemiconductor PhysicsSemiconductor SurfacesSemiconductor Thin FilmsSuperconducting MaterialsSuperconducting Thin FilmsThin Film AnnealingAnnealing EffectsAnnealing Temperature EffectsHigh-temperature Superconducting FilmsHigh-temperature SuperconductorsRapid Thermal AnnealingSuperconducting Critical TemperatureThermal AnnealingThermal Annealing Effects
A very rapid thermal annealing technique has been employed on sputter-deposited YBaCuO films. After an O2 anneal (with or without a N2 preanneal) at temperatures as high as 920 °C for 8–12 s, films on (100)Si and on SiO2 /Si substrates exhibited superconductivity onsets above 95 K and zero resistance in the range 40–66 K.
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Superconducting Y-Ba-Cu-O oxide films by sputtering
M. Hong, S. H. Liou, J. Kwo et al. · Applied Physics Letters · 1987 · 157 citations